Sapphire Tube

    Sapphire tubes and Sapphire injectors for Semiconductor,offering extremely high purity and long life. replace quartz and ceramic.In addition,sapphire tubes are can be widely used in various analytical instruments,such as lamp applications that transmit visible, infrared or ultraviolet light, often with high intensity at high temperatures and pressures. Sapphire has proven to be an enabling technology to expand the use of aggressive process chemistries,These function is not possible with quartz and ceramic components.

Main Specification (in mm)

1.ID: Φ20.00 ~ Φ200.00       (custom available)

2.ID Tolerance: 0.004 ~ 0.05

3.OD: Φ10.00 ~ Φ180.00      (custom available)

4.OD Tolerance:0.004 ~ 0.06

5.Length:10.00~ 250.00       

6.Length Tolerance: +/-0.01

Surface quality: S/D40/20

Feature

 -High hardness - 9H

 -Scratch resistance

 -Abrasion resistance

 -High mechanical strength

 -High temperature resistance

 -Good thermal stability

 -High optical production rate

Semiconductor Processing

(HPD CVD, PECVD, Dry Etch, Wet Etch)

 -Plasma containment tubes

 -Plasma applicator tube

 -Process gas injector nozzles

 -Thermocouple protection sheath (Thermowell)

 -Water treatment / cleaning

 -Lift pins

 -Endpoint detector

 -Excimer Corona Tubes

Test and Analytical

 -Nuclear Magnetic Resonance spectroscopy (NMR)

 -Inductively coupled plasma mass spectrometry (ICP-MS)

 -Thermo-optic temperature measurement

 -Inline petroleum processing analysis

 -Mass spectroscopy

 -Biological and chemical sample analysis

 -Plugged tubes

 -Test tubes

Lamps and Lamp Envelopes

 -Electronic Infra-Red countermeasures

 -Ultraviolet sterilization

 -Flashlamps

 -High-intensity lamps